Technical features
- Applies DPSSL 355nm light source
- Supports 8-130 inches format
- Ultra-precision system
- High precision environmental control system
- Active vibration isolation system
- High-precision air-floating motion platform
- High-speed patterning
- Stroboscopic tiled beam spot exposure
- 3D navigation auto-focus
Specifications
* Final interpretation rights belong to the company.
Example applications
